CMP Slurry PROCESS MATERIALS REFERENCEWhat a useful quote must specify
There is no universal public CMP slurry price. Commercial quotes depend on the product, volume, concentration, packaging, region and terms. This guide does not publish price estimates. It provides a buyer-built calculation structure.
| Quote item | Normalize or clarify | Risk if omitted |
|---|---|---|
| Price basis | Currency, supplied liter or mass basis, unit and applicable volume tier. | Comparing unlike units or volume commitments. |
| Concentration / preparation | Supplied state, approved dilution and other required components. | A concentrate looking expensive despite a different use basis. |
| Usable quantity | Preparation yield, purge, hold and expiry losses. | Treating every purchased liter as useful polish volume. |
| Delivered cost | Freight, containers, duties and other applicable charges. | An ex-works quote being compared with a delivered quote. |
| Process conditions | Flow, polish time, rinse/purge and wafer count basis. | Material savings hiding a throughput penalty. |
| Quality / continuity | Release documentation, support, change control and backup path. | An apparently low price carrying unpriced operational risk. |
Slurry material cost per wafer
First calculate the material used at point of use. Include all polishing stages assigned to the comparison and measured delivery losses. Use consistent volume and time units.
Purchased volume per wafer = POU polish volume ÷ expansion factor + allocated supplied-product losses
Slurry material cost per wafer = purchased volume × supplied-unit price + other required component costs
Here, “expansion factor” means liters of usable point-of-use slurry prepared from one liter of supplied product under the approved instructions. Define it explicitly. A quoted “1:4” can be ambiguous unless the parties state whether it means one part concentrate plus four parts water or a fourfold final volume.
Concentrate and ready-to-use comparison
| Input | Ready-to-use candidate | Concentrate candidate |
|---|---|---|
| Supplied unit price | Supplier quote on the agreed unit. | Supplier quote on the agreed unit. |
| Expansion factor | Normally one if used as supplied; confirm. | Approved final usable volume per supplied unit. |
| Other components | Record any required external component. | Record activators, water and other approved preparation inputs. |
| Preparation / hold losses | Allocated measured loss. | Allocated measured loss, including unusable prepared material. |
| Consumption | Measured at the qualified process. | Measured at the qualified process, not assumed identical. |
| Preparation burden | Receiving, delivery and use controls. | Additional mixing, timing, water and monitoring controls where applicable. |
Calculate a scenario for each candidate with the same wafer basis. Where an input is uncertain, show a range or leave it unresolved. Do not convert unknown yield or downtime effects into a precise-looking total.
Total process cost extends beyond the slurry
- Pad, conditioning, filter and cleaning consumables.
- Tool time and throughput under the qualified process.
- Preparation, handling, storage and monitoring work.
- Waste, expired product, unused prepared slurry and disposal.
- Defect-related loss, rework or scrap when supported by actual data.
- Planned qualification, transition and monitoring costs.
- Downtime and variability costs using the buyer’s own assumptions.
- Logistics, packaging and continuity inventory.
Separate recurring process cost from one-time qualification and transition work. If the model converts cost per processed wafer into cost per acceptable wafer, define the acceptance or yield basis and avoid counting the same loss twice.
A transparent sourcing decision
Require technical gates before comparing economic scores. A candidate with unacceptable defects cannot become a viable production choice by assigning a low value to yield loss. Use measured consumption and trial-supported process time where possible.
Procurement and engineering should agree which assumptions are fixed, which are candidate-specific, and which need confirmation. Include shelf life at receipt and forecast commitments: discounting a large order may create expiry losses that erase the saving.
Request quotes on a consistent basis CSV ↓